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DESIGN AND SIMULATIONS OF IDC SENSOR USING COMSOL MULTIPHYSICS AND DIELECTRIC SPECTROSCOPY OF LTCC MATERIALS Buletinul AGIR nr. 4/2012 octombrie-decembrie Workshop: Opto-acoustics with COMSOL opto-mechanics or MEMS) require fundamentally similar Opto-acoustic with COMSOL July 15, 2016 3 / 21.

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